Vacuum controller for passive sensors in rough industrial and research applications (incl. radioactive environments)
The new three-channel vacuum display and controller COMBIVAC CM 51 for industrial and research applications monitors and controls the complete vacuum range from atmospheric pressure (1000 mbar) down to the ultra high vacuum range (10-9 mbar). All channels can be operated simultaneously and absolutely independently.
The vacuum gauge is designed for Pirani and Penning passive (passive, as there are no electronic parts inside the sensor) sensors, which are radiation resistant and bakeable.
The COMBIVAC CM 51 operates in harsh and highly corrosive industrial applications. It is also suitable for use in areas with high levels of radiation and systems requiring high temperature bake out where only passive sensors can be operated.
Typical Applications
• Process Industry
– Vacuum Furnaces
– Electron Beam Welding
– Coating
– Lighting
• Research and Development
– Accelerators
– MBE (Molecular Beam Epitaxy)
– STM (Scanning Tunneling Microscope)
• Analytical Instruments
– Surface analysis
Additional advantages
• Compact bench top enclosure, also for racks (1/4 19-in., 3 HU)
• High sensor reliability and lifetime
• 3- channel-measurement and display simultaneously
• Cable length up to 100 meters
• RS 232 C and profibus interface for communication and remote control
• Connection of aligned and temperature compensated THERMOVAC sensors
• Connection of compact, bakeable and rugged PENNINGVAC sensors
• Automatic switchover and high voltage control from THERMOVAC to PENNING (cold cathode) operation
• Error message for each channel, for example in the case of broken filament, defective sensor line or failed plasma discharge
For further information contact:
Oerlikon Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Köln
Phone: +49 (0) 221 347-1578
Fax: +49 (0) 221 347-31578
[email protected]
www.oerlikon.com/leyboldvacuum